Certas Leaga Energy Equipment & Supplies

1 equipment items found

Certas Leaga - High-Throughput Gas Chemical Etch System

Manufactured by:Tokyo Electron Limited (TEL) based inTokyo, JAPAN

Certas LEAGA™ is an environment-friendly, high-throughput gas chemical etch system designed for 300mm wafers to provide surface etch and cleaning without the use of liquids. Its dry processing features watermark-free, unique selectivity performance over various SiO2 films and precise control of interface cleaning. It offers greater flexibility when combined with TEL’s cleaning system. ...

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